A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control
- Creator: Maroufi, Mohammad , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing
- Creator: Rakotondrabe, Micky , Fowler, Anthony G. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014